Infex 10 Series Integrated Roughness and Contour Measuring Instrument
Cost-effective roughness and contour one time measurement solution.
Adopt high rigidity, high accuracy, maintenance-free linear motion guide rail, can control the measuring system with high precision performance.
Technical Specification
Model | Infex 10 | |
Column | Measuring range | 0-620mm optional |
Drive unit | Measuring range | 0-220mm optional |
Indicating accuracy | ±(0.8+2L/100)μm | |
Straightness | ≤0.3μm/100mm | |
Detector | Measuring range | ±10mm |
Z1 axis contour indicating accuracy | ≤±(0.8+|0.12H|)μm | |
Z1 axis roughness indicating accuracy | ≤±(8nm+3.5%) | |
Repeatability | 1δ≤2nm | |
Residual noise | ≤0.012μm | |
Stylus | Standard,diamond 5μm/90° | |
Measuring accuracy | Arc | ≤±(1.2+R/12)μm |
Arc Pt | ≤±0.3μm | |
Angle | ≤±1′ |
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